DocumentCode
1950512
Title
Impact of Electrical Stress on Hot-Electron Injection in Ultra-Thin SiO2 Films
Author
Okhonin, S. ; Berk, Y. ; Ils, A. ; Fazan, P. ; Guegan, G. ; Deleonibus, S. ; Martin, F.
Author_Institution
Swiss Federal Institute of Technology, Lausanne, Switzerland
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
588
Lastpage
591
Keywords
Conductivity; Electron emission; Electron optics; MOS capacitors; Secondary generated hot electron injection; Silicon compounds; Stress; Substrate hot electron injection; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505571
Link To Document