Title :
Simulation of a Coating Protection for an In Situ Ellipsometer in a CVD Furnace
Author :
Poscher, Stefan ; Lehnert, Wolfgang ; Ryssel, Heiner
Author_Institution :
Fraunhofer-Institut f¨ur Integrierte Schaltungen, Erlangen, Germany
Keywords :
Chemical sensors; Chemical vapor deposition; Coatings; Furnaces; Gas lasers; Laser beams; Nitrogen; Optical sensors; Protection; Semiconductor device modeling;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
