Title :
Analysis of defects in solid phase crystallized and laser crystallized unhydrogenated polysilicon thin film transistors
Author :
Pichon, L. ; Mercha, A. ; Bonnaud, O. ; Carin, R. ; Helen, Y. ; Mourgues, K. ; Raolt, F. ; Mohammed-Brahim, T.
Author_Institution :
Universite de Caen, France
Keywords :
Amorphous silicon; Annealing; Crystallization; Grain boundaries; Insulation; Plasma applications; Solid lasers; Substrates; Thin film transistors; Threshold voltage;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
