DocumentCode
1951461
Title
Simulation of high sensitivity and stability surface acoustic wave NO2 gas sensor based on amplitude variations as measurand
Author
El-Shennawy, K. ; Orabi, M.S. ; Taha, T.E.
Author_Institution
Fac. of Eng. & Technol., Arab Acad. for Sci. & Technol. & Martime Transp., Alexandria, Egypt
Volume
2
fYear
2000
fDate
2000
Firstpage
611
Abstract
This paper presents the use of Surface Acoustic Wave (SAW) devices as gas sensors utilizing Multi-Strip Coupler (MSC), where the amplitude of the SAW´s is the measured quantity, based on conductivity changes of the used sensor film. A theoretical model for SAW-MSC on LiNbO3 substrate and using Copper phthalocyanine (CuPc) as a sensor layer for NO2 gas sensor is illustrated. A computer simulation program is developed to obtain the variations in the insertion loss (IL) of the device under the adsorption influence of the substance to be detected, and its results are compared with the published experimental results
Keywords
gas sensors; nitrogen compounds; surface acoustic wave sensors; LiNbO3 substrate; NO2; NO2 gas sensor; adsorption; amplitude measurement; computer simulation; copper phthalocyanine thin film; electrical conductivity; insertion loss; multistrip coupler; sensitivity; stability; surface acoustic wave device; Acoustic measurements; Acoustic sensors; Acoustic waves; Conductive films; Conductivity measurement; Gas detectors; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Conference_Location
Nis
Print_ISBN
0-7803-5235-1
Type
conf
DOI
10.1109/ICMEL.2000.838765
Filename
838765
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