Good temperature coefficient of frequency SAW resonator on a SiO2/Al/LiNbO3 structure

Author

Nakanishi, H. ; Nakamura, H. ; Tsurunari, T. ; Fujiwara, J. ; Hamaoka, Y. ; Hashimoto, K.

Author_Institution

Corp. Components Dev. Div., Panasonic Electron. Devices Co. Ltd., Kadoma, Japan

fYear

2010

fDate

11-14 Oct. 2010

Firstpage

1298

Lastpage

1301

Abstract

This paper describes a good temperature coefficient of frequency (TCF) surface acoustic wave (SAW) resonator on a SiO₂/Al/LiNbO₃ structure. We studied the dependence of TCF and electromechanical coupling factor (K²) of shear-horizontal (SH) SAW on the SiO₂ thickness, where the SiO₂ shape control technique is applied to suppress spurious responses caused by Rayleigh-mode. As the results, we could realize high performance SAW resonator having moderate K₂ (8%) and zero TCF with complete suppression of the Rayleigh-mode spurious response. It was demonstrated that the SiO₂ shape control technique is effective for suppression of the Rayleigh-mode spurious response in the SAW resonator using the SiO₂/Al/LiNbO₃ structure with wide range of SiO₂ thicknesses. We also revealed applicability of the SiO₂/Al/LiNbO₃ structure to SAW duplexers with narrow duplex gap.

Keywords

aluminium; code division multiple access; electromechanical effects; lithium compounds; shape control; silicon compounds; surface acoustic wave resonators; surface acoustic waves; Rayleigh-mode spurious response suppression; SAW duplexer; SiO₂-Al-LiNbO₃; TCF; electromechanical coupling factor; narrow duplex gap; shape control technique; shear-horizontal SAW; surface acoustic wave resonator; temperature coefficient of frequency SAW resonator; Lithium niobate; Resonant frequency; Shape; Shape control; Surface acoustic waves; Temperature; Rayleigh-mode spurious response; SAW resonator; SiO2 shape control; SiO2/Al/LiNbO3 structure; TCF;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2010 IEEE

Conference_Location

San Diego, CA

ISSN

1948-5719

Print_ISBN

978-1-4577-0382-9

Type

conf

DOI

10.1109/ULTSYM.2010.5935465

Filename

5935465