Title :
Q-factor estimation of fabricated MEMS parallel-plate variable capacitors in MUMPs
Author :
Elshurafa, Amro M. ; El-Masry, Ezz I.
Author_Institution :
Dept. of Electr. & Comput. Eng., Dalhousie Univ., Halifax, NS, Canada
Abstract :
This paper gives a brief review of both the MUMPs technology and the common micro-machined parallel plate tunable capacitors. Further, several factors that contribute in creating discrepancy between designed and measured capacitance and/or degrading the quality factor of the MEMS variable capacitor are discussed. Finally, a novel and extremely simple relation that anticipates the value of the quality factor of the fabricated variable capacitors is introduced.
Keywords :
Q-factor; capacitance; micromechanical devices; varactors; MEMS parallel plate variable capacitors; Q-factor estimation; capacitance; micromachined parallel plate tunable capacitors; multiuser MEMS process; quality factor; Capacitance measurement; Capacitors; Electrostatics; Fabrication; Inductors; Microelectromechanical devices; Micromechanical devices; Q factor; Radio frequency; Varactors;
Conference_Titel :
Circuits and Systems, 2004. NEWCAS 2004. The 2nd Annual IEEE Northeast Workshop on
Print_ISBN :
0-7803-8322-2
DOI :
10.1109/NEWCAS.2004.1359034
