Title :
Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials
Author :
Fatikow, Sergej ; Eichhorn, Volkmar ; Bartenwerfer, Malte ; Krohs, Florian
Author_Institution :
Dept. of Comput. Sci., Univ. of Oldenburg, Oldenburg, Germany
Abstract :
In this paper, a nanorobotic system containing a custom-made nanohandling robot, atomic force microscope, scanning electron microscope and focused ion beam is presented. The nanorobotic atomic force microscope system facilitates the analysis of nanostructured surfaces as well as the handling of nanoobjects. Furthermore, a gas injection system is available that enables particle beam-based structuring and deposition of nanomaterials. This combination provides an enabling technology for the hybrid processing, manipulation and characterization of nanomaterials.
Keywords :
atomic force microscopy; focused ion beam technology; grippers; micromanipulators; scanning electron microscopy; custom-made nanohandling robot; focused ion beam; nanomaterials; nanorobotic AFM system; nanorobotic FIB system; nanorobotic SEM system; nanorobotic atomic force microscope system; particle beam-based structuring; scanning electron microscope; Atomic force microscopy; Grippers; Nanoscale devices; Scanning electron microscopy; Substrates; Surface treatment;
Conference_Titel :
Emerging Technologies & Factory Automation (ETFA), 2013 IEEE 18th Conference on
Conference_Location :
Cagliari
Print_ISBN :
978-1-4799-0862-2
DOI :
10.1109/ETFA.2013.6648143
