Title :
Schematic driven MEMS design
Author :
Meiners, Mirco ; Sommer, Ralf ; Graeb, Helmut
Author_Institution :
Automotive Electron., Robert Bosch GmbH, Reutlingen, Germany
Abstract :
Microelectromechanical systems are important components for so-called cyber-physical systems. If a seamless MEMS design methodology for monolithic and hybrid systems overcomes current tool and workflow discrepancies in MEMS and IC design flows, further capabilities can be made available. This paper gives an overview of requirements on and solution approaches for an integrated MEMS/ASIC design flow.
Keywords :
application specific integrated circuits; integrated circuit design; micromechanical devices; cyber-physical systems; hybrid systems; integrated MEMS-ASIC design flow; microelectromechanical systems; monolithic systems; schematic driven MEMS design; seamless design methodology; tool discrepancies; workflow discrepancies; Analytical models; Application specific integrated circuits; Integrated circuit modeling; Layout; Micromechanical devices; Solid modeling; ASIC; MEMS; design flow; seamless design; sensor system;
Conference_Titel :
Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012 International Conference on
Conference_Location :
Seville
Print_ISBN :
978-1-4673-0685-0
DOI :
10.1109/SMACD.2012.6339431
