Title :
Prediction of the Radiation Response of Simox Using Spectroscopic Ellipsometry
Author :
McMarr, P.J. ; Mrstik, B.J. ; Lawrence, R.K.
Author_Institution :
Naval Research Laboratory, Washington, DC
Keywords :
Annealing; DC generators; Ellipsometry; Fabrication; Implants; Laboratories; MOS capacitors; Performance evaluation; Silicon compounds; Spectroscopy;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664816
