DocumentCode
1952406
Title
Simulation of the frequency response of a thermal flow sensor in gaseous media
Author
Reyes-Romero, Diego Fernando ; Urban, Gerald Anton
Author_Institution
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
fYear
2012
fDate
16-18 April 2012
Firstpage
42376
Lastpage
42558
Abstract
The frequency response of a calorimetric flow sensor is simulated for many selected gases. The effect of selected thermal properties of the gas on the frequency response is analyzed. The thermal conductivity is found to be the dominant parameter on the cut-off frequency of the sensor. This influence seems to be linear in nature. Moreover, the influence of the flow speed on the frequency response is also found to be much smaller than that of the thermal conductivity.
Keywords
calorimeters; flow sensors; frequency response; temperature sensors; calorimetric flow sensor; flow speed influence; frequency response simulation; gas thermal property; gaseous media; sensor cut-off frequency; thermal conductivity; thermal flow sensor; Atmospheric modeling; Heating; Thermal conductivity; Thermistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location
Cascais
Print_ISBN
978-1-4673-1512-8
Type
conf
DOI
10.1109/ESimE.2012.6191728
Filename
6191728
Link To Document