• DocumentCode
    1952406
  • Title

    Simulation of the frequency response of a thermal flow sensor in gaseous media

  • Author

    Reyes-Romero, Diego Fernando ; Urban, Gerald Anton

  • Author_Institution
    Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
  • fYear
    2012
  • fDate
    16-18 April 2012
  • Firstpage
    42376
  • Lastpage
    42558
  • Abstract
    The frequency response of a calorimetric flow sensor is simulated for many selected gases. The effect of selected thermal properties of the gas on the frequency response is analyzed. The thermal conductivity is found to be the dominant parameter on the cut-off frequency of the sensor. This influence seems to be linear in nature. Moreover, the influence of the flow speed on the frequency response is also found to be much smaller than that of the thermal conductivity.
  • Keywords
    calorimeters; flow sensors; frequency response; temperature sensors; calorimetric flow sensor; flow speed influence; frequency response simulation; gas thermal property; gaseous media; sensor cut-off frequency; thermal conductivity; thermal flow sensor; Atmospheric modeling; Heating; Thermal conductivity; Thermistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
  • Conference_Location
    Cascais
  • Print_ISBN
    978-1-4673-1512-8
  • Type

    conf

  • DOI
    10.1109/ESimE.2012.6191728
  • Filename
    6191728