Title :
Wettability of organic ferroelectric material on metal substrate
Author :
Hau, William ; Iwamoto, Nancy ; Fan, Hai-bo ; Zhu, Guo-dong ; Wang, Tun ; Yuen, Matthew M F
Author_Institution :
Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
Abstract :
Ferroelectric materials, Poly(vinylidene fluoride-co-trifluoroethylene) (P(VDF-TrFE)), has been widely adopted for the fabrication of devices. The performance of device could be adversely affected by presence of defects. At high humidity environment, pores were typically observed on spin-coated P(VDF-TrFE) thin film, when the film thickness was at sub-micrometer scale. The mechanism of pore formation could be explained by the presence of moisture layer on gold substrate, or “breath figure” effect. In this research, the two mechanisms were studied through molecular dynamics simulations.
Keywords :
ferroelectric materials; substrates; wetting; breath figure effect; film thickness; gold substrate; humidity environment; metal substrate; moisture layer; molecular dynamics simulation; organic ferroelectric material; pore formation; spin-coated thin film; submicrometer scale; wettability; Aluminum;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
DOI :
10.1109/ESimE.2012.6191738