Title :
Characterization of intermetallic compounds in Cu-Al ball bonds: Mechanical properties, delamination strength and thermal conductivity
Author :
Kouters, M.H.M. ; Gubbels, G.H.M. ; Yuan, C.A.
Author_Institution :
TNO Tech. Sci., Eindhoven, Netherlands
Abstract :
In high power automotive electronics copper wire bonding is regarded as most promising alternative for gold wire bonding in 1st level interconnects and therefore subjected to severe functional requirements. In the Cu-Al ball bond interface the growth of intermetallic compounds may deteriorate the electrical, thermal and mechanical properties. The layer growth and properties of these intermetallic compounds are crucial in the prediction of the long term behavior. To mimic the growth of intermetallic compounds during and after copper ball bonding, diffusion couples of aluminium and copper were annealed at 225-500°C and chemically analyzed by SEM/EDS. Also five separate intermetallic compounds were melted together from the pure elements and aged in evacuated quartz ampoules for 240 hours at 500°C. In this work values for the indentation Young´s modulus, load independent hardness, indentation fracture toughness, volumetric densities, interface delamination and thermal conductivity are presented. It can be concluded that the Cu-rich intermetallics Cu9Al4 and Cu3Al2 are less sensitive to fracture and have lower average densities than the other intermetallic compounds. The volumetric decrease during formation causes internal stress. Interfacial delamination initiates in the Al-rich intermetallics (CuAl, CuAl2) and propagates easily into other intermetallic layers. The Cu9Al4 - Cu s.s. is also found to be susceptible for delamination fracture. The thermal conductivity is much lower than for pure copper or aluminium and in the range of 26-87 W/m-1*K-1, where Cu3Al2 layer has the lowest thermal conductivity (26-33 W/m-1*K-1).
Keywords :
Young´s modulus; aluminium alloys; annealing; automotive electronics; copper alloys; delamination; fracture toughness; hardness; integrated circuit interconnections; internal stresses; lead bonding; thermal conductivity; 1st level interconnects; Cu3Al2; Cu9Al4; SEM/EDS; Young´s modulus; annealing; ball bond interface; copper ball bonding; copper wire bonding; delamination fracture; delamination strength; electrical properties; high power automotive electronics; indentation fracture toughness; interface delamination; intermetallic compound growth; intermetallic layer; internal stress; layer growth; load independent hardness; mechanical properties; quartz ampoules; temperature 225 C to 500 C; temperature 500 C; thermal conductivity; thermal properties; time 240 hour; volumetric densities; Artificial intelligence; Compounds; Copper; Equations; Heating; Nonhomogeneous media; Q measurement; Cu-Al intermetallics; Cu-wire bonding; thermal aging; thermo-mechanical properties;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
DOI :
10.1109/ESimE.2012.6191740