Simulations of thermo-elastic losses in a meta-material bulk bar resonator

In this paper we investigate the thermo-elastic losses in bulk mode bar MEMS resonators implemented using a meta-material composed of square inclusions. A quasi-static extraction technique is used to extract the effective thermal and mechanical properties of the meta-material. These effective parameters are used in the resonator simulation, greatly decreasing the required simulation time required to simulate the thermo-elastic losses of a bulk resonator with inclusions. This allows the investigation of the impact of the thermo-elastic damping (TED) in bulk bar resonators when using meta-materials. It is shown that as the density of the proposed metamaterial is decreased, the limit on the frequency and quality factor product FQTED imposed by TED also decreases.