• DocumentCode
    1953060
  • Title

    Modelling of the Electric Field Assisted Capillarity Effect used for the fabrication of hollow polymer microstructures

  • Author

    Tonry, C. ; Patel, M. ; Bailey, C. ; Desmuliez, M.P.Y. ; Cargill, S. ; Yu, W.

  • Author_Institution
    Sch. of Comput. & Math. Sci., Univ. of Greenwich, London, UK
  • fYear
    2012
  • fDate
    16-18 April 2012
  • Firstpage
    42375
  • Lastpage
    42527
  • Abstract
    Electric Field Assisted Capillarity (EFAC) is a novel process which has the potential for the single step fabrication of hollow polymer microstructures. The process has been shown to work experimentally on a microscale level using Polydimethylsiloxane (PDMS). The process makes use of both the electrohydrodynamics of polymer at a microscale and the voltage enhanced capillary force exerted on the polymer. This paper discusses the results of a two-dimensional numerical simulation of this process. The results presented use a patterned master electrode producing encapsulated microchannels in the polymer. The simulations demonstrate how the differing contact angles between the polymer and the walls of the master electrode affect the thickness of the top surface of the formed microstructures. It also specifies the conditions necessary for the successful fabrication of such microstructures.
  • Keywords
    hydrodynamics; lithography; polymers; electric field assisted capillarity effect; electrohydrodynamics; encapsulated microchannels; hollow polymer microstructures; patterned master electrode; polydimethylsiloxane; single step fabrication; Electrodes; Electronic mail; Manganese; Numerical models; Polymers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
  • Conference_Location
    Cascais
  • Print_ISBN
    978-1-4673-1512-8
  • Type

    conf

  • DOI
    10.1109/ESimE.2012.6191758
  • Filename
    6191758