DocumentCode
1953060
Title
Modelling of the Electric Field Assisted Capillarity Effect used for the fabrication of hollow polymer microstructures
Author
Tonry, C. ; Patel, M. ; Bailey, C. ; Desmuliez, M.P.Y. ; Cargill, S. ; Yu, W.
Author_Institution
Sch. of Comput. & Math. Sci., Univ. of Greenwich, London, UK
fYear
2012
fDate
16-18 April 2012
Firstpage
42375
Lastpage
42527
Abstract
Electric Field Assisted Capillarity (EFAC) is a novel process which has the potential for the single step fabrication of hollow polymer microstructures. The process has been shown to work experimentally on a microscale level using Polydimethylsiloxane (PDMS). The process makes use of both the electrohydrodynamics of polymer at a microscale and the voltage enhanced capillary force exerted on the polymer. This paper discusses the results of a two-dimensional numerical simulation of this process. The results presented use a patterned master electrode producing encapsulated microchannels in the polymer. The simulations demonstrate how the differing contact angles between the polymer and the walls of the master electrode affect the thickness of the top surface of the formed microstructures. It also specifies the conditions necessary for the successful fabrication of such microstructures.
Keywords
hydrodynamics; lithography; polymers; electric field assisted capillarity effect; electrohydrodynamics; encapsulated microchannels; hollow polymer microstructures; patterned master electrode; polydimethylsiloxane; single step fabrication; Electrodes; Electronic mail; Manganese; Numerical models; Polymers;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location
Cascais
Print_ISBN
978-1-4673-1512-8
Type
conf
DOI
10.1109/ESimE.2012.6191758
Filename
6191758
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