DocumentCode :
1953163
Title :
Assessment of thermo-mechanical stresses in Low Temperature Joining Technology
Author :
Herboth, Thomas ; Früh, Christiane ; Günther, Michael ; Wilde, Jürgen
Author_Institution :
Robert Bosch GmbH, Schwieberdingen, Germany
fYear :
2012
fDate :
16-18 April 2012
Firstpage :
42376
Lastpage :
42558
Abstract :
The Low Temperature Joining Technology (LTJT) creates silver joints by a sintering process. It is an alternative die-attach technology to soldering. To initiate the sintering process the temperature has to be raised above ~ 215°C. The quality of a sintered joint is strongly enhanced by applying pressure to the specimen during the process, thus reducing the porosity in the sintered material. After the interconnect process, residual stresses occur in the sintered material, as well as in the joined parts. The examined specimen was a silicon MOSFET attached to a copper substrate at a sintering pressure of 50 MPa. The scope of this paper is to provide information about residual stress after production and thermo-mechanical stresses during thermal cycling. The focus is put on the investigation of the reliability of sintered silver by simulation.
Keywords :
joining processes; microassembling; sintering; thermal stresses; copper substrate; die-attach technology; interconnect process; low temperature joining technology; porosity; residual stresses; silicon MOSFET; silver joints; sintering process; soldering; thermal cycling; thermo-mechanical stresses; Copper; MOSFET circuits; Nickel; Thermomechanical processes;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
Type :
conf
DOI :
10.1109/ESimE.2012.6191762
Filename :
6191762
Link To Document :
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