Title :
A low cost monolithic accelerometer; product/technology update
Author :
Sherman, S.J. ; Tsang, W.K. ; Core, T.A. ; Payne, R.S. ; Quinn, D.E. ; Chau, K.H.-L. ; Farash, J.A. ; Baum, S.K.
Author_Institution :
Analog Devices Inc., Wilmington, MA, USA
Abstract :
Described is a complete monolithic accelerometer, which combines a surface micromachined polysilicon sensor with BiMOS interface circuitry. As much as possible, the device exploits existing high volume wafer fabrication technology. Ultimately, this scheme should make acceleration sensing a commodity function, with signal span accuracy approaching 5%. The circuit architecture is reviewed and recent characterization results reported.<>
Keywords :
BIMOS integrated circuits; accelerometers; elemental semiconductors; integrated circuit technology; silicon; BiMOS interface circuitry; Si; monolithic accelerometer; surface micromachined polysilicon sensor; wafer fabrication; Acceleration measurement; BIMOS integrated circuits; Integrated circuit fabrication; Silicon;
Conference_Titel :
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1992.307410
