DocumentCode
1953460
Title
Quality factor control for micromechanical resonators
Author
Nguyen, C.T.-C. ; Howe, R.T.
Author_Institution
Electron. Res. Lab., California Univ., Berkeley, CA, USA
fYear
1992
fDate
13-16 Dec. 1992
Firstpage
505
Lastpage
508
Abstract
The implementation of very high Q microelectromechanical filters, constructed of spring-coupled or parallel resonators, requires strict control over the quality factor of the constituent resonators. This report details electrostatic feedback techniques which allow precise control of the quality factor of a micromechanical resonator device, independent of the ambient operating pressure of the micromechanical system. Theoretical formulas governing Q-control are derived and experimentally verified.<>
Keywords
Q-factor; crystal resonators; electromechanical filters; equivalent circuits; feedback; micromechanical devices; Q-control; electrostatic feedback; high Q microelectromechanical filters; micromechanical resonators; parallel resonators; quality factor; quality factor control; spring-coupled resonators; Equivalent circuits; Feedback; Microelectromechanical devices; Piezoelectric resonators; Q-factor;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-0817-4
Type
conf
DOI
10.1109/IEDM.1992.307411
Filename
307411
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