Title :
Quality factor control for micromechanical resonators
Author :
Nguyen, C.T.-C. ; Howe, R.T.
Author_Institution :
Electron. Res. Lab., California Univ., Berkeley, CA, USA
Abstract :
The implementation of very high Q microelectromechanical filters, constructed of spring-coupled or parallel resonators, requires strict control over the quality factor of the constituent resonators. This report details electrostatic feedback techniques which allow precise control of the quality factor of a micromechanical resonator device, independent of the ambient operating pressure of the micromechanical system. Theoretical formulas governing Q-control are derived and experimentally verified.<>
Keywords :
Q-factor; crystal resonators; electromechanical filters; equivalent circuits; feedback; micromechanical devices; Q-control; electrostatic feedback; high Q microelectromechanical filters; micromechanical resonators; parallel resonators; quality factor; quality factor control; spring-coupled resonators; Equivalent circuits; Feedback; Microelectromechanical devices; Piezoelectric resonators; Q-factor;
Conference_Titel :
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1992.307411
