DocumentCode
1953468
Title
Micro-machined array probe card
Author
Beiley, M.A. ; Wong, S.S.
Author_Institution
Center for Integrated Syst., Stanford Univ., CA, USA
fYear
1992
fDate
13-16 Dec. 1992
Firstpage
509
Lastpage
512
Abstract
A membrane probe card designed for high speed, high pin count testing has been fabricated with conventional IC technology on a silicon wafer and its functionality demonstrated. A novel method of breaking down interfacial oxide, as a replacement for mechanical scrubbing, is proposed and demonstrated. The probe card can consistently provide contact resistance of <2 Omega , has greatly reduced parasitics, is capable of elevated temperature testing, and offers controlled impedance striplines of 50 Omega to the probe tips.<>
Keywords
electric sensing devices; integrated circuit testing; membranes; printed circuits; probes; 2 ohm; Si wafer; contact resistance; controlled impedance striplines; conventional IC technology; electrical breakdown; high pin count testing; interfacial oxide; mechanical scrubbing; membrane probe card; micromachined array probe card; probe tips; striplines; Detectors; Integrated circuit testing; Membranes; Printed circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-0817-4
Type
conf
DOI
10.1109/IEDM.1992.307412
Filename
307412
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