Characterization of a single port aluminum nitride tuning fork

Author

Vigevani, Gabriele ; Przybyla, Richard J. ; Yen, Ting-Ta ; Lin, Chih-Ming ; Guedes, Andre ; Kuypers, Jan H. ; Boser, Bernhard E. ; Horsley, David A. ; Pisano, Albert P.

Author_Institution

Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, CA, USA

fYear

2010

fDate

11-14 Oct. 2010

Firstpage

1281

Lastpage

1285

Abstract

In this study the characterization of an aluminum nitride (A1N) double ended tuning fork (DETF) fabricated on a layer of silicon dioxide (SiO₂) is presented. The positive temperature coefficients of SiO₂ are used to achieve zero TCF for radio frequency (RF) Lamb wave resonators. This paper shows the possibility to integrate temperature compensated Lamb wave resonators with DETF-based devices on a single chip. The DETF resonates in a quasi-in-plane mode shape with a Q-factor of 578 in air and 3028 in vacuum. Through a laser Doppler velocity (LDV) measurement we also show that, due to the biomorph nature of the structure and the angle of the side walls, the motion of each tine of the DETF is a combination of in-plane bending, out-of-plane bending and torsional motion around the beam main axis.

Keywords

Q-factor; acoustic resonance; acoustic resonators; aluminium compounds; bending; micromechanical devices; micromechanics; silicon compounds; surface acoustic wave devices; surface acoustic waves; torsion; vibrations; AlN; DETF based devices; DETF resonance; LDV measurement; Q-factor; SiO₂; beam main axis; biomorph structure; double ended tuning fork; in plane bending; laser Doppler velocity measurement; out of plane bending; positive temperature coefficients; quasi-in plane mode shape; radiofrequency Lamb wave resonators; side wall angle; silicon dioxide layer; single port aluminum nitride tuning fork; temperature compensated Lamb wave resonators; torsional motion; tuning fork characterization; zero TCF; Electrodes; Measurement by laser beam; Micromechanical devices; Q factor; Resonant frequency; Shape; Vibrations; Aluminum Nitride; Double Ended Tuning Fork; Lamb Wave Resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2010 IEEE

Conference_Location

San Diego, CA

ISSN

1948-5719

Print_ISBN

978-1-4577-0382-9

Type

conf

DOI

10.1109/ULTSYM.2010.5935543

Filename

5935543