Title :
Photo patterned thick-film resonators
Author :
Dziurdzia, Barbara ; Nowak, Stanislaw ; Gregorczyk, Wojciech ; Ciez, Michat
Author_Institution :
Dept. of Electron., Univ. of Min. & Metall., Krakow, Poland
Abstract :
Microwave circuit demands for high resolution patterning, rectangular cross-sections, sharp edges and smooth surfaces are met by the photo-imageable thick-film technology, successfully competing with traditional screen printing. This paper presents parameters of photosensitive pastes, describes the exposure and development units necessary for carrying out the photoimaging process, depicts manufacturing steps that lead to forming microwave structures with parameters comparable to thin film ones. Edge-coupled filters of centre frequency 6, 12 and 14 GHz, built with microstrip resonators, are the test samples. The transmission and reflection characteristics of filters are measured using a vector network analyser and compared to the simulated characteristics.
Keywords :
dielectric resonator filters; microstrip resonators; photolithography; thick film circuits; 12 GHz; 14 GHz; 6 GHz; exposure/development units; filter centre frequency; filter transmission/reflection characteristics; high resolution patterning; microstrip resonator edge-coupled filters; microwave circuits; microwave structure manufacture; photo patterned thick-film resonators; photo-imageable thick-film technology; photoimaging process; photosensitive pastes; rectangular cross-sections; screen printing; sharp edges; smooth surfaces; thin film circuits; vector network analyser; Frequency; Lead; Manufacturing processes; Microwave circuits; Microwave filters; Microwave technology; Printing; Pulp manufacturing; Resonator filters; Transistors;
Conference_Titel :
Microwaves, Radar and Wireless Communications, 2002. MIKON-2002. 14th International Conference on
Print_ISBN :
83-906662-5-1
DOI :
10.1109/MIKON.2002.1017889
