Title :
A 32*32 two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFTs integrated on a transparent substrate
Author :
Okamura, M. ; Kimura, K. ; Shirai, S. ; Yamauchi, N.
Author_Institution :
Interdisciplinary Res. Labs., NTT, Tokyo, Japan
Abstract :
We have designed, fabricated, and characterized a 32*32 two-dimensional photodetector array using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) TFTs integrated on a transparent substrate. This work demonstrates the feasibility of a light-transmitting two-dimensional photodetector array for use in parallel optoelectronic systems such as free-space photonic switching systems.<>
Keywords :
amorphous semiconductors; optical switches; p-i-n photodiodes; photodetectors; silicon; thin film transistors; 32*32 two-dimensional photodetector array; Si; TFTs; free-space photonic switching systems; light-transmitting array; parallel optoelectronic systems; pin photodiodes; transparent substrate; Amorphous semiconductors; Optical switches; Photodetectors; Silicon; Thin film transistors; p-i-n photodiodes;
Conference_Titel :
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1992.307452
