Title :
Wafer-scale replication of optical components on VCSEL wafers
Author :
Gimkiewicz, Chr. ; Zschokke, Chr. ; Obi, S. ; Urban, C. ; Pedersen, J.S. ; Gale, M.T. ; Moser, M.
Author_Institution :
Centre Suisse d´´Electronique et de Microtechnique, Zurich, Switzerland
Abstract :
Microoptical structures on top of various substrates and optoelectronic devices like VCSELs are demonstrated in a wafer-scale process combining uv-casting and lithography. Some optical properties of the replicated refractive lenses are presented.
Keywords :
casting; laser cavity resonators; microlenses; optoelectronic devices; photolithography; replica techniques; surface emitting lasers; VCSEL wafers; lithography; microoptical structures; optical components; replicated refractive lenses; uv-casting; wafer-scale replication;
Conference_Titel :
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location :
Los Angeles, CA, USA
Print_ISBN :
1-55752-772-5
