Title :
Initial Evaluation of Cmos/soi Devices Fabricated on Plasma-Thinned Bonded Silicon Wafers
Author :
Aubuchon, K. ; Pinter, J. ; Matloubian, M. ; Barger, M. ; McClain, R. ; Marsh, O.
Author_Institution :
Hughes Aircraft Company, CA
Keywords :
Circuit testing; Electric breakdown; Fabrication; Insulation; Plasma applications; Plasma chemistry; Plasma devices; Silicon on insulator technology; Thick film circuits; Wafer bonding;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664837
