DocumentCode
1955229
Title
Initial Evaluation of Cmos/soi Devices Fabricated on Plasma-Thinned Bonded Silicon Wafers
Author
Aubuchon, K. ; Pinter, J. ; Matloubian, M. ; Barger, M. ; McClain, R. ; Marsh, O.
Author_Institution
Hughes Aircraft Company, CA
fYear
1992
fDate
6-8 Oct. 1992
Firstpage
154
Lastpage
155
Keywords
Circuit testing; Electric breakdown; Fabrication; Insulation; Plasma applications; Plasma chemistry; Plasma devices; Silicon on insulator technology; Thick film circuits; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 1992. IEEE International
Conference_Location
Ponte Vedra Beach, FL
ISSN
1078-621X
Print_ISBN
0-7803-7439-8
Type
conf
DOI
10.1109/SOI.1992.664837
Filename
664837
Link To Document