Micro solid state silicon plate wind velocity sensor

A wind velocity sensor using the torque of cantilever to measure the velocity of wind is presented in this paper. It consists of a thin silicon plate and two short cantilevers which connect with the plate and silicon substrate and will bend when wind blow to the plate. The wind velocity is obtained by measuring the strain caused by the deflection of the cantilevers. The designed sensor was simulated with ANSYS software using the model solid92 and analyzed with fluid mechanics principle and material mechanics principle. It is fabricated using MEMS surface and body micromachining process. By testing the designed sensor within small wind tunnel the results of calculation and simulation are validated. When the input voltage is 0.5 V we obtain a sensor capable of high sensitivity 60 muv/(m/s) at the high wind velocity.