Amorphous and polysilicon device simulations

Thin-film transistors (TFTs) and photodiodes fabricated from hydrogenated amorphous silicon (a-Si) and polycrystalline silicon (poly-Si) are now being used in many commercial large-area electronic applications; in particular high-resolution active-matrix flat-panel displays and electrographic printers. In order to develop new cost-effective applications using this technology, it is important to be able to accurately model the behavior of these devices. This paper describes some of the capabilities of the MANIFEST computer program which has been developed to simulate amorphous and polysilicon devices in two spatial dimensions and time.<>