Title :
Vacuum Chemical Epitaxial Growth of High Quality Gaas Films Using Dimethylamine Gallane
Author :
Malocsay, E. ; Fraas, L.M. ; Sundaram, V.S.
Author_Institution :
Boeing High Technology Center, WA
Keywords :
Aluminum; Carbon compounds; Chemicals; Conductivity; Epitaxial growth; Gallium arsenide; Inductors; MOCVD; Molecular beam epitaxial growth; Photoluminescence;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664847