Title :
Design and simulation of 4-bit 10-14GHz RF MEMS tunable filter
Author :
Zou, Xudong ; Chen, Kenle ; Zhang, Hualiang ; Zhang, Jinwen
Author_Institution :
Nat. Key Lab. of Nano/Micro Fabrication Technol. Inst. of Microelectron., Peking Univ., Beijing
Abstract :
This paper presents a 4-bit RF microelectromechanical system (MEMS) wide-band tunable filter at the 10-14 GHz frequency range. Open-ended shunt stubs are utilized to load RF MEMS capacitive switches and MAM capacitors acting as the tunable cells, and leads to lower loss and more flexibility of design. The simulation results obtained by 3D electromagnetic simulation tool show that the tuning range is about 30% (from 10.5 GHz to 13.5 GHz) and the insertion loss is from -4.8 dB to -5.2 dB.
Keywords :
capacitors; circuit tuning; coplanar waveguide components; microswitches; microwave filters; resonator filters; waveguide filters; 3D simulation; MAM capacitors; RF MEMS capacitive switches; RF MEMS filter; coplanar-waveguide resonators; frequency 10 GHz to 14 GHz; insertion loss; loss -4.8 dB to -5.2 dB; metal-air-metal capacitors; microelectromechanical system; open-ended shunt stubs; three-dimensional electromagnetic simulation; two-pole loaded resonator tunable filter; wideband tunable filter; Radiofrequency microelectromechanical systems; MAM capacitor; Open-ended Shunt Stub; RF MEMS; Tunable Filter;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068518
