The simulation of frequency-capacitance characteristics of fresh water conductivity sensor

Author

Yi, Jikun ; Li, Wei ; Lingfang Wang ; Zhiyu Wen

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

29

Lastpage

32

Abstract

A frequency based sensor is presented to measure the conductivity of fresh water. A MEMS based conductivity sensor is designed to form the RC-Wien-Bridge Oscillator, and the conductivity of tested sample could be obtained according to frequency of the Oscillator by calibrating the frequency to the conductivity of standard liquid. In this paper, system description and electronic simulation are presented with an emphasis on the simulation of actual capacitance and frequency-capacitance characteristics of fresh water conductivity sensor. The results indicate the frequency range dedicated for fresh water conductivity measurement is from 90 kHz to 434 KHz. It is promising to measure the conductivity of fresh water with this kind of frequency based sensor.

Keywords

electric sensing devices; electrical conductivity; micromechanical devices; oscillators; water; MEMS; RC-Wien-Bridge oscillator; conductivity sensor; frequency 90 kHz to 434 kHz; frequency-capacitance characteristics; fresh water; Capacitance-voltage characteristics; Capacitive sensors; Conductivity measurement; Frequency measurement; Micromechanical devices; Oscillators; Sensor phenomena and characterization; Sensor systems; Testing; Water; Conductivity sensor; Frequency; Fresh water; Wien-Bridge Oscillator;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068520

Filename

5068520