Title :
Sensitivity analysis and structure design for tri-mass structure micromachined gyroscope
Author :
Xie, Liqiang ; Xiao, Dingbang ; Wang, Haoxu ; Wu, Xuezhong ; Li, Shengyi
Author_Institution :
Coll. of Mechatron. Eng. & Autom., Nat. Univ. of Defense Technol., Changsha
Abstract :
The design method for increasing gyroscope sensitivity is studied. By designing lumped parameter models of uni-mass, bi-mass, and tri-mass gyroscope structures, the influence between sensitivity and model parameters is analyzed. These three gyroscope structures are optimized in the same condition and the result shows that the sensitivity ratio of the three structures is 1:7:800 in the condition of frequency matching. Tri-mass structure´s high sensitivity shows its advantage in high performance design.
Keywords :
gyroscopes; lumped parameter networks; micromachining; sensitivity analysis; bimass gyroscope structures; frequency matching; gyroscope structures; lumped parameter models; sensitivity analysis; structure design; trimass structure micromachined gyroscope; unimass gyroscope structures; Aerodynamics; Design engineering; Gyroscopes; Laplace equations; Micromechanical devices; Resonance; Resonant frequency; Sensitivity analysis; Systems engineering and theory; Vehicle dynamics; Micromachined gyroscope; sensitivity analysis; structure design; tri-mass;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068541
