Title :
SOI-based capacitive micromechanical resonator with submicron gap-spacing
Author :
Liu, Yi ; Tang, Yaquan ; Xiaomei Yu
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing
Abstract :
MEMS resonators are promising as micromechanical oscillators and filters in wireless communication systems. This paper reports on the fabrication and characterization of single crystal silicon (SCS) disk resonators with sub-micro capacitive gaps. Vertical capacitive gaps as small as 100 nm have been demonstrated in this work. High frequency disk resonators have been implemented and tested.
Keywords :
crystal resonators; microfabrication; micromechanical resonators; mobile communication; silicon-on-insulator; SOI; Si-SiO2; capacitive micromechanical resonator; filter; high resonance frequency; micromechanical oscillator; single crystal silicon disk resonator; submicron gap-spacing; vertical capacitive gap; wireless communication system; Driver circuits; Electrodes; Fabrication; Impedance; Micromechanical devices; Optical resonators; Resonance; Resonant frequency; Silicon; Voltage; MEMS; SOI; disk resonator; sub-micro gap;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068542
