Parameter design of the capacitive position sensing circuit for a differentially-driven electrostatic microactuator

Author

Dong-Ki Min ; Jeon, Jong Up

Author_Institution

Storage Lab, Samsung Adv. Inst. of Technol., Suwon, South Korea

fYear

2001

fDate

2001

Firstpage

168

Lastpage

171

Abstract

The parameters of the capacitive position sensing circuit for a differentially-driven electrostatic actuator are designed in this paper. Taking the practical requirements into consideration such as SNR requirement, nondistortion and saturation-free conditions, each parameter boundaries and the resultant boundary are determined. In the resultant boundary, the sensitivity function of the charge amplifier output with respect to the displacement is used as an objective function and the parameters producing the highest sensitivity in the obtained boundary are determined. The experimental results are given proving the effectiveness of the proposed design procedure

Keywords

capacitive sensors; circuit noise; electrostatic actuators; position measurement; sensitivity analysis; SNR requirement; boundary; capacitive position sensing circuit; charge amplifier output; design procedure; differentially-driven electrostatic microactuator; displacement; objective function; parameter design; saturation-free conditions; sensitivity function; Capacitance; Capacitive sensors; Circuits; Demodulation; Electrodes; Electrostatic actuators; Signal processing; Signal to noise ratio; Stators; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors for Industry, 2001. Proceedings of the First ISA/IEEE Conference

Conference_Location

Rosemont, IL

Print_ISBN

0-7803-6659-X

Type

conf

DOI

10.1109/SFICON.2001.968523

Filename

968523