Title :
Parameter design of the capacitive position sensing circuit for a differentially-driven electrostatic microactuator
Author :
Dong-Ki Min ; Jeon, Jong Up
Author_Institution :
Storage Lab, Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
The parameters of the capacitive position sensing circuit for a differentially-driven electrostatic actuator are designed in this paper. Taking the practical requirements into consideration such as SNR requirement, nondistortion and saturation-free conditions, each parameter boundaries and the resultant boundary are determined. In the resultant boundary, the sensitivity function of the charge amplifier output with respect to the displacement is used as an objective function and the parameters producing the highest sensitivity in the obtained boundary are determined. The experimental results are given proving the effectiveness of the proposed design procedure
Keywords :
capacitive sensors; circuit noise; electrostatic actuators; position measurement; sensitivity analysis; SNR requirement; boundary; capacitive position sensing circuit; charge amplifier output; design procedure; differentially-driven electrostatic microactuator; displacement; objective function; parameter design; saturation-free conditions; sensitivity function; Capacitance; Capacitive sensors; Circuits; Demodulation; Electrodes; Electrostatic actuators; Signal processing; Signal to noise ratio; Stators; Voltage;
Conference_Titel :
Sensors for Industry, 2001. Proceedings of the First ISA/IEEE Conference
Conference_Location :
Rosemont, IL
Print_ISBN :
0-7803-6659-X
DOI :
10.1109/SFICON.2001.968523
