DocumentCode
1956178
Title
Fabrication of micro temperature sensor and heater in a stainless steel-based micro reformer
Author
Lee, Chi-Yuan ; Lee, Shuo-Jen ; Shih, Wen-Pin ; Lin, Chen-Hen ; Chang, Chi-Chung ; Chang, Pei-Zen
Author_Institution
Dept. of Mech. Eng., Yuan Ze Univ., Taoyuan
fYear
2009
fDate
5-8 Jan. 2009
Firstpage
172
Lastpage
175
Abstract
Among those problems regarding use of micro reformers that have not yet been solved include reducing their size, decreasing the amount of CO and combining the fuel cell, among others. Therefore, in this work, a micro temperature sensor and a heater are combined inside a stainless steel-based micro reformer to measure the temperature, to improve performance and minimize the concentration of CO. Micro-electro-mechanical-systems (MEMS) of the micro channel type are fabricated on a stainless steel substrate to enhance the methanol conversion ratio. A micro temperature sensor and a heater are placed separately inside a micro reformer. The main advantages of micro temperature sensors are their higher accuracy and sensitivity than those of a traditional thermocouple. Micro temperature sensors and heaters have not been applied in micro reformers and commercial products. Hence, this investigation proposes a novel approach for integrating a micro temperature sensor and a heater in a stainless steel-based micro reformer, to minimize size and optimize performance.
Keywords
microfabrication; microsensors; temperature sensors; heater; methanol conversion ratio; microchannel; microelectro-mechanical-systems; microtemperature sensor; stainless steel-based microreformer; Fabrication; Temperature sensors; MEMS; micro reformer; micro temperature sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location
Shenzhen
Print_ISBN
978-1-4244-4629-2
Electronic_ISBN
978-1-4244-4630-8
Type
conf
DOI
10.1109/NEMS.2009.5068552
Filename
5068552
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