• DocumentCode
    1956178
  • Title

    Fabrication of micro temperature sensor and heater in a stainless steel-based micro reformer

  • Author

    Lee, Chi-Yuan ; Lee, Shuo-Jen ; Shih, Wen-Pin ; Lin, Chen-Hen ; Chang, Chi-Chung ; Chang, Pei-Zen

  • Author_Institution
    Dept. of Mech. Eng., Yuan Ze Univ., Taoyuan
  • fYear
    2009
  • fDate
    5-8 Jan. 2009
  • Firstpage
    172
  • Lastpage
    175
  • Abstract
    Among those problems regarding use of micro reformers that have not yet been solved include reducing their size, decreasing the amount of CO and combining the fuel cell, among others. Therefore, in this work, a micro temperature sensor and a heater are combined inside a stainless steel-based micro reformer to measure the temperature, to improve performance and minimize the concentration of CO. Micro-electro-mechanical-systems (MEMS) of the micro channel type are fabricated on a stainless steel substrate to enhance the methanol conversion ratio. A micro temperature sensor and a heater are placed separately inside a micro reformer. The main advantages of micro temperature sensors are their higher accuracy and sensitivity than those of a traditional thermocouple. Micro temperature sensors and heaters have not been applied in micro reformers and commercial products. Hence, this investigation proposes a novel approach for integrating a micro temperature sensor and a heater in a stainless steel-based micro reformer, to minimize size and optimize performance.
  • Keywords
    microfabrication; microsensors; temperature sensors; heater; methanol conversion ratio; microchannel; microelectro-mechanical-systems; microtemperature sensor; stainless steel-based microreformer; Fabrication; Temperature sensors; MEMS; micro reformer; micro temperature sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
  • Conference_Location
    Shenzhen
  • Print_ISBN
    978-1-4244-4629-2
  • Electronic_ISBN
    978-1-4244-4630-8
  • Type

    conf

  • DOI
    10.1109/NEMS.2009.5068552
  • Filename
    5068552