Title :
Characterization of Si3N4/SiC Microstructure Derived from UV curable polymer ceramic precursor pyrolyzing
Author :
Ya-Zhou, Wang ; Li-Xin, Chen ; Jia-Le, Song
Author_Institution :
Dept. of Appl. Chem., Northwestern Polytech. Univ., Xi´´an
Abstract :
The microstructure of Si3N4/SiC derived from the pyrolysis of UV curable polymer ceramic precursor was analyzed and characterized by TGA-DTA, XRD, FE-SEM, Electron Spectrometer, and TEM. It was found that two distinct weight loss rate peaks at 358degC and 450degC in TGA curve were identical with two DTA endothermic peaks. The total weight loss was 45wt%. The degree of crystallinity reached 91.25% after annealing at 1600degC for 2h with the composition of SiO2: Si3N4: SiC = 3:26:71 in pyrolysate. Not only did the degree of crystallinity increase, but also the change from alpha-Si3N4 to beta -Si3N4 took place with the increase of holding time. Irregular whisker of Si3N4 was explored by SEM after pyrolyzing at 1400 degC for 24 h.
Keywords :
X-ray diffraction; crystal microstructure; curing; differential thermal analysis; polymers; pyrolysis; scanning electron microscopy; silicon compounds; transmission electron microscopy; FE-SEM; Si3N4-SiC; Si3N4/SiC microstructure; TEM; TGA-DTA; UV curing; XRD; crystallinity; electron spectrometer; polymer ceramic precursor; pyrolysate; pyrolysis; temperature 1400 degC; temperature 1600 degC; temperature 358 degC; temperature 450 degC; time 2 h; time 24 h; weight loss rate; Annealing; Ceramics; Crystallization; Micromechanical devices; Microstructure; Polymers; Silicon carbide; Spectroscopy; Temperature; X-ray scattering; Characterization; Precursor; Pyroylate; UV-curing;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068555
