The kinematic analysis of the volumetric error measurement of a prismatic guideway based on six optical sensors and three diffraction gratings

Author

Mueller, Ulrich ; Kagawa, Yoshihito ; Yamazaki, Kazuo

Author_Institution

Dept. of Mech. & Aerosp. Eng., California Univ., Davis, CA, USA

fYear

2001

fDate

2001

Firstpage

224

Lastpage

228

Abstract

A six degree of freedom encoder based on 3 optical gratings and six sensing elements was developed to measure the position as well as the volumetric deviations of a linear motion axis. In order to evaluate the performance of the device and in order to create a mathematical representation a kinematic model was developed. The kinematic models as well as the influence of geometric errors due to manufacturing and assembly are discussed

Keywords

diffraction gratings; kinematics; machine tools; measurement errors; optical sensors; accuracy measurement tests; assembly; diffraction gratings; geometric errors; kinematic analysis; linear motion axis; machine tool; manufacturing; mathematical representation; optical sensors; prismatic guideway; volumetric deviations; volumetric error measurement; Diffraction gratings; Displacement measurement; Feeds; Kinematics; Machine tools; Motion measurement; Optical diffraction; Optical receivers; Optical sensors; Volume measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors for Industry, 2001. Proceedings of the First ISA/IEEE Conference

Conference_Location

Rosemont, IL

Print_ISBN

0-7803-6659-X

Type

conf

DOI

10.1109/SFICON.2001.968534

Filename

968534