3D Mass-loading effect of metallic electrodes with ultra-high aspect ratios in SAW devices

For the first time the influence of a massive electrode attached to a massive busbar will be presented based on a first-principle stress analysis. To demonstrate the validity of our concept which utilizes problem-specific entire-domain basis- and testing functions, and the associate modified Green´s functions in two and three dimensions, we shall present three representative examples to exhaust all relevant cases in practical applications. The convergent rate of the numerical results is impressively high compared with the available data from literature, and commercially available software packages, e.g. ANSYS simulation package: Even with a comparatively low number of expansion functions (unknowns) remarkably superior results can be achieved in terms of both accuracy and the robustness of the calculation. Finally it will be demonstrated how our technique easily enables the solution of corrugated structures consisting of periodic or non-periodic structures consisting of fully anisotropic elastic materials and structures with indentations. The combination of the extensions to aforementioned method allows the mass-loading analysis in commonly utilized sophisticated SAW and BAW devices efficiently, robustly, and fast. An extensive series of numerical experiments have been carried out to ensure a rigorous error analysis.