Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation

This paper presents a novel micro-gyroscope which is resistant to shock and sensitive to biaxial applied angular velocity. This device has very simple structure and is completed solid. The vibration of piezoelectric bulk (PZT), which is excited in special resonance mode, is used as reference vibration. When angular velocity is applied to x or y axis, voltage is generated by coriolis force at different positions on the PZT surface. This generated voltage is proportional to the applied angular velocity. Detailed structure design, performance analysis, operation principle, and detection control system of this micro device are given. Several desired reference vibrations (resonance modes) of the three structures, and the performance parameters such as maximum sense displacement, coupling displacement, mode detection voltage and so on, are gained by FEM. The anchors of these solid gyroscopes, which are critical for gyroscopes to work accurately, are discussed. Finally, the optimized structure, reference vibration of this structure and detection control method are obtained under considering the resolution, the coupling effect, convenient anchors and detection control of the device. We also find a special point to detect resonance mode for ensuring the device work in reference vibration.