Design of a new wireless SAW gyroscope based on standing wave mode

This paper presents a configuration of a novel wireless surface acoustic wave (SAW) gyroscope. It consists of a two-port SAW resonator, and reflective delay line parallel to the resonator. A metallic dot array was positioned onto the anti-node location of the standing wave formed by the resonator, and was used as the proof masses. A secondary SAW is generated in the orthogonal direction, and interferes with the initial SAW in reflective delay line created by the antenna and wireless reader unit. The interference effect induces the velocity shift of the initial SAW, and resulting in the phase change of the reflection peaks in time domain. Thus, the input rotation was evaluated accordingly. The SAW devices used for gyroscope are simulated prior to fabrication by coupling of modes (COM). Difference of method was used to compensate the temperature effect. Then, the SAW gyroscope sample with operation frequency of 80MHz was fabricated and characterized primarily by the HP network analyzer. Measured results agree well with the simulated data. Further work about the performance evaluation of the wireless gyroscope will be done soon.