Title :
Improvement of a micro-beam in a smart gas sensor with resonating mechanism
Author :
Zhao, Jia Hao ; Yu, Shi Jie ; Li, Ke ; Dong, Ying ; Zhou, Qin ; You, Zheng
Author_Institution :
Dept. of Precision Instrum. & Mech., Tsinghua Univ., Beijing
Abstract :
A micro-beam of a creative smart resonating gas sensor with a self-actuating and detecting (SAD) system is presented. The smart SAD sensor, in which the resonance frequency shifting of the MEMS cantilever is monitored to probe its mass change caused by adsorption of certain gas molecules, has never need exclusive detection circuits and instruments, and the micro-beam has never need additional detective MEMS structure consequently. Some design rules of the more compact micro-beam has been obtained by computer simulation analysis and related discusses. Some electrostatic driving MEMS beam has been fabricated by surface silicon micromachining and sacrificial layer process with low cost, and tested by laser vibration-meter system. An improvement of the micro-beam is introduced by comparison study of the computer simulation results and testing results of the fabricated beam.
Keywords :
adsorption; cantilevers; elemental semiconductors; gas sensors; micromachining; micromechanical devices; silicon; MEMS cantilever; adsorption; computer simulation analysis; detecting system; gas molecules; laser vibration-meter system; resonance frequency shifting; sacrificial layer process; self-actuating system; smart resonating gas sensor; surface silicon micromachining; Computer simulation; Computerized monitoring; Gas detectors; Intelligent sensors; Laser beams; Micromechanical devices; Probes; RLC circuits; Resonance; Resonant frequency; SAD; cantilever; micro-beam; resonance frequency; smart gas sensor;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068598
