Title :
Silicon-on-insulator racetrack resonator tuning via ion implantation
Author :
Ackert, Jason ; Logan, Dylan ; Doylend, J. ; Knights, Andrew ; Chrostowski, L. ; Vafaei, Raha ; Jessop, P.
Author_Institution :
Dept. of Eng. Phys., McMaster Univ., Hamilton, ON, Canada
Abstract :
We demonstrate wavelength tuning of silicon-on-insulator racetrack resonators, induced by the by the creation of defects via ion implantation. This presents a method to alter the resonant wavelength after fabrication, albeit with increased optical loss.
Keywords :
integrated optics; ion implantation; optical fabrication; optical losses; optical resonators; optical tuning; silicon-on-insulator; Si; ion implantation; optical fabrication; optical loss; resonant wavelength; silicon-on-insulator racetrack resonator; wavelength tuning; Annealing; Ion implantation; Optical device fabrication; Optical losses; Optical ring resonators; Optical waveguides; ion implantation; optical waveguides; ring resonators;
Conference_Titel :
Group IV Photonics (GFP), 2011 8th IEEE International Conference on
Conference_Location :
London
Print_ISBN :
978-1-4244-8338-9
DOI :
10.1109/GROUP4.2011.6053744