• DocumentCode
    1957457
  • Title

    Silicon-on-insulator racetrack resonator tuning via ion implantation

  • Author

    Ackert, Jason ; Logan, Dylan ; Doylend, J. ; Knights, Andrew ; Chrostowski, L. ; Vafaei, Raha ; Jessop, P.

  • Author_Institution
    Dept. of Eng. Phys., McMaster Univ., Hamilton, ON, Canada
  • fYear
    2011
  • fDate
    14-16 Sept. 2011
  • Firstpage
    145
  • Lastpage
    147
  • Abstract
    We demonstrate wavelength tuning of silicon-on-insulator racetrack resonators, induced by the by the creation of defects via ion implantation. This presents a method to alter the resonant wavelength after fabrication, albeit with increased optical loss.
  • Keywords
    integrated optics; ion implantation; optical fabrication; optical losses; optical resonators; optical tuning; silicon-on-insulator; Si; ion implantation; optical fabrication; optical loss; resonant wavelength; silicon-on-insulator racetrack resonator; wavelength tuning; Annealing; Ion implantation; Optical device fabrication; Optical losses; Optical ring resonators; Optical waveguides; ion implantation; optical waveguides; ring resonators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2011 8th IEEE International Conference on
  • Conference_Location
    London
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4244-8338-9
  • Type

    conf

  • DOI
    10.1109/GROUP4.2011.6053744
  • Filename
    6053744
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1957457