DocumentCode :
1957702
Title :
Small scanning mirror mechanism
Author :
Onillon, Emmanuel ; Henein, Simon ; Theurillat, Patrick
Author_Institution :
CSEM, Neuchatel, Switzerland
Volume :
2
fYear :
2003
fDate :
20-24 July 2003
Firstpage :
1129
Abstract :
The CSEM has developed an optomechanical linear scanner. This scanner has a limited displacement range, performed with high resolution. The resolution is obtained through a very high precision motion guiding of the scanner itself. This paper describes the main features of the scanner system as well as its control system. After a complete description of the system, a state space model derived from the mechanical and electrical equations of the system is introduced. This model will be used for the design of a state space controller based on a pole placement algorithm, to make the system behave as a fourth order Bessel filter. To better track the desired reference trajectory, a feedforward will be added to the controller as well as a disturbance observer. Moreover, at each startup, an auto identification followed by a controller re-calculation is performed.
Keywords :
control system synthesis; feedforward; identification; micromirrors; optical scanners; pole assignment; state-space methods; Swiss Center of Electronics and Microelectronics; auto identification; disturbance observer; electrical equations; fourth order Bessel filter; mechanical equations; optomechanical linear scanner; pole placement algorithm; precision motion; scanner system; scanning mirror mechanism; state-space controller design; state-space model; Actuators; Adaptive optics; Blades; Coils; Mirrors; Optical filters; Optical interferometry; Optical sensors; State-space methods; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on
Print_ISBN :
0-7803-7759-1
Type :
conf
DOI :
10.1109/AIM.2003.1225501
Filename :
1225501
Link To Document :
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