High density hybrid integrated light source with a laser diode array on a silicon optical waveguide platform for inter-chip optical interconnection

A hybrid integrated light source was developed with a novel configuration in which a laser diode (LD) array was mounted on a silicon optical waveguide platform for inter-chip optical interconnection. An output power uniformity of 1.3 dB was observed at the 13-channel integrated light source with 30-μm pitch. Use of a SiON waveguide with a spot size converter resulted in an optical coupling loss of 1 dB between an LD and a SiON waveguide. The integrated light source including 52 output ports was demonstrated to reduce the footprint per channel. These integrated light sources are attractive candidates for use with photonic integrated circuits for high density optical interconnection.