Title :
CMOS-compatible integration of III–V VCSELs based on double photonic crystal reflectors
Author :
Sciancalepore, Corrado ; Bakir, Badhise Ben ; Letartre, Xavier ; Olivier, Nicolas ; Seassal, Christian ; Bordel, Damien ; Rojo-Romeo, Pedro ; Regreny, Philippe ; Fedeli, Jean-Marc ; Viktorovitch, Pierre
Author_Institution :
Inst. des Nanotechnol. de Lyon, Ecole Centrale de Lyon, Ecully, France
Abstract :
Vertical-cavity surface-emitting lasers (VCSELs) based on double photonic crystal reflectors for the heterogeneous integration on complementary metal-oxide-semiconductor (CMOS) are presented. The latest achievements in technological processing and optical mode engineering are shown and discussed.
Keywords :
III-V semiconductors; integrated optics; optical elements; photonic crystals; surface emitting lasers; CMOS-compatible integration; III-V VCSEL; complementary metal-oxide-semiconductor; double photonic crystal reflectors; heterogeneous integration; optical mode engineering; vertical-cavity surface-emitting lasers; Optical device fabrication; Optical pumping; Optical reflection; Optical surface waves; Phase change materials; Photonic crystals; Vertical cavity surface emitting lasers; Photons; photonic crystals; semiconductor laser; slow Bloch mode; vertical-cavity surface-emitting lasers (VCSELs);
Conference_Titel :
Group IV Photonics (GFP), 2011 8th IEEE International Conference on
Conference_Location :
London
Print_ISBN :
978-1-4244-8338-9
DOI :
10.1109/GROUP4.2011.6053764
