Title :
Transverse modes suppression and loss reduction for buried electrodes SAW devices
Author :
Solal, M. ; Gratier, J. ; Aigner, R. ; Gamble, K. ; Abbott, B. ; Kook, T. ; Chen, A. ; Steiner, K.
Author_Institution :
TriQuint Semicond., Apopka, FL, USA
Abstract :
High coupling substrates using overcoat layers of silicon oxide for temperature compensation exhibit a strong affinity toward multi-mode behavior. Apodization, which is the standard technique to suppress the transverse modes, suffers from drawbacks such as reduction of the transduction efficiency and additional losses. By changing the transducer layout, the guiding can be improved and a "piston mode" can be obtained. This approach is demonstrated on resonators and DMS test devices manufactured on lithium niobate with an orientation close to YX128 deg.
Keywords :
surface acoustic wave resonators; DMS test devices; LiNbO3; apodization technique; buried electrode SAW devices; high coupling substrates; lithium niobate; loss reduction; piston mode resonators; silicon oxide overcoat layers; temperature compensation; transduction efficiency reduction; transverse mode suppression; Acoustics; Apertures; Electrodes; Pistons; Resonant frequency; Shape; Transducers;
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0382-9
DOI :
10.1109/ULTSYM.2010.5935738