Full-wafer loss measurements of silicon ridge waveguides

Author

Gould, Michael ; Li, Jing ; Baehr-Jones, Tom ; Hochberg, Michael

Author_Institution

Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA

fYear

2011

fDate

14-16 Sept. 2011

Firstpage

234

Lastpage

236

Abstract

We present full-wafer loss data for ridge waveguides for three different geometries fabricated on 150 mm silicon-on-insulator wafers. Full-wafer testing was made possible by a vertically coupled, automated test system.

Keywords

automatic test equipment; integrated optics; loss measurement; optical waveguides; silicon-on-insulator; automated test system; different geometries; full wafer loss measurements; silicon on insulator wafers; silicon ridge waveguides; Couplers; Geometry; Loss measurement; Optical waveguides; Photonics; Silicon; Testing; full wafer; grating coupler; integrated photonics; silicon; waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Group IV Photonics (GFP), 2011 8th IEEE International Conference on

Conference_Location

London

ISSN

1949-2081

Print_ISBN

978-1-4244-8338-9

Type

conf

DOI

10.1109/GROUP4.2011.6053774

Filename

6053774

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1958130