Title :
Surface acoustic wave linear motor for two-dimensional optical positioning system
Author :
Xing, Yumei ; Li, YiGui ; Zhang, Junfeng ; Gao, Gaoyang
Author_Institution :
Nat. Key Lab. of Micro/Nano Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai
Abstract :
We have proposed to utilize a surface acoustic wave (SAW) linear motor for two-dimensional optical positioning system and demonstrated its possibility. The interdigital transducers (IDTs) are used as stator actuator of SAW motors, and fabricated on LiNbO3 substrate material using epitaxial lift-off technology. Four IDTs are arranged to excite x- and y-propagation waves in two axes. The dimensions of the IDT are 200 mum in pitch, 50 mum in electrode strip width and 9 mm in aperture. The IDT is composed of 20 strip electrode pairs and operates at about 19 MHz Rayleigh wave. With four radio frequency (RF) driving sources, two-direction forward and reverse motion is possible. Scanning electrode microscope (SEM) and Impedance/gain phase analyzer and etc. were employed to evaluate the performance of SAW motors. The results showed that the SAW motor has subnanometer positioning ability, indicating a promising application in optical positioning system.
Keywords :
interdigital transducers; linear motors; scanning electron microscopy; surface acoustic wave devices; LiNbO3; epitaxial lift-off technology; interdigital transducers; stator actuator; surface acoustic wave linear motor; two-dimensional optical positioning system; Acoustic transducers; Acoustic waves; Actuators; Electrodes; Optical surface waves; Radio frequency; Scanning electron microscopy; Stators; Strips; Surface acoustic waves;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068641
