• DocumentCode
    1958255
  • Title

    Deep submicron LOCOS-defined SOI photonic wire waveguides

  • Author

    Tam, Andrew W. ; Ibrahim, Marc ; Lamontagne, Boris ; Tarr, N. Garry ; Ye, Winnie N. ; Janz, Siegfried ; Xu, Danxia

  • Author_Institution
    Dept. of Electron., Carleton Univ., Ottawa, ON, Canada
  • fYear
    2011
  • fDate
    14-16 Sept. 2011
  • Firstpage
    249
  • Lastpage
    251
  • Abstract
    The LOCOS technique for formation of SOI optical waveguides has been extended to produce low-loss photonic wire channel waveguides with deep submicron dimensions using a very simple process.
  • Keywords
    integrated optics; optical waveguides; silicon-on-insulator; SOI optical waveguides; Si; deep submicron LOCOS-defined SOI photonic wire waveguides; deep submicron dimensions; low-loss photonic wire channel waveguides; Couplers; Optical sensors; Optical surface waves; Optical waveguides; Photonics; Silicon; Wires; LOCOS; SOI waveguides; photonic wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2011 8th IEEE International Conference on
  • Conference_Location
    London
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4244-8338-9
  • Type

    conf

  • DOI
    10.1109/GROUP4.2011.6053779
  • Filename
    6053779
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1958255