Design and analysis of RF MEMS Varactor for extended tuning range

Author

Gupta, Puneet ; Singh, Prashant ; Chaudhry, Rajshri Kumari ; Srivastava, Prashant

Author_Institution

Dept. of Microelectron., IIIT-Allahabad, Allahabad, India

fYear

2013

fDate

3-4 Aug. 2013

Firstpage

1

Lastpage

4

Abstract

Electrostatically actuated parallel plate MEMS Varactor is a low power, highly sensitive and robust device. Simple parallel plate Varactor structure possesses a maximum tuning range of 1.5:1 after which the plates start collapsing. In the present paper we have employed different Varactor designs for extended tuning range. The major effort is done to develop a Varactor that can achieve tuning range greater than 1.5. The design and analysis is carried out on COMSOL Multiphysics simulation tool in accordance with standard POLYMUMP´S process.

Keywords

electrostatic actuators; micromechanical devices; microwave devices; tuning; varactors; COMSOL Multiphysics simulation tool; RF MEMS varactor; electrostatically actuated parallel plate MEMS varactor; extended tuning range; standard POLYMUMP process; varactor design; Capacitance; Micromechanical devices; Radio frequency; Structural beams; Tuning; Varactors; cantilever; capacitive value; parallel plate; tuning range;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Computing Communication & Materials (ICCCCM), 2013 International Conference on

Conference_Location

Allahabad

Print_ISBN

978-1-4799-1374-9

Type

conf

DOI

10.1109/ICCCCM.2013.6648915

Filename

6648915