Design of a multi-walled carbon nanotubes vacuum gauge

Author

Dong, Ki-Young ; Youngmin ; Moon, Seung-Il ; Lee, Jinwoo ; Choi, Jinnil ; Ju, Byeong-Kwon

Author_Institution

Coll. of Eng., Korea Univ., Seoul

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

609

Lastpage

611

Abstract

Measurements of the variation of vacuum level inside of field emission device when electron is emitted from carbon nanotubes (CNT) by electric field were performed. Multi-walled carbon nanotubes (MWCNT) sensor packaged with a vacuum device is used to measure the degree of a vacuum until the end of the vacuum device life. It was found that the electrical properties of MWCNTs altered with the degree of a vacuum. We fabricated MWCNT sensors which were printed and pasted by the screen printer. In this article, we report the successful detection of the ionization of gases in vacuum state.

Keywords

carbon nanotubes; electric sensing devices; electron field emission; nanotube devices; vacuum gauges; MWCNT sensor; carbon nanotubes; electric field; electron emission; field emission device; multiwalled carbon nanotube vacuum gauge; screen printer; vacuum device; Carbon nanotubes; Chemical vapor deposition; Electron emission; Gases; Glass; Indium tin oxide; Packaging; Powders; Vacuum systems; Vehicles; field emission; multi-walled carbon nanotues; sensor; vacuum gauge;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068654

Filename

5068654