Title :
Analysis of Silicon Ridge Waveguides for Acoustic Surface Waves
Author_Institution :
Laboratorium voor Elektromagnetisme en Acustica, University of Ghent, Ghent, Belgium.
Keywords :
Acoustic propagation; Acoustic waveguides; Dispersion; Etching; Fabrication; Frequency; Laboratories; Machining; Silicon; Surface acoustic waves;
Conference_Titel :
Microwave Conference, 1973. 3rd European
Conference_Location :
Brussels, Belgium
DOI :
10.1109/EUMA.1973.331716
