Langasite SAW device with gas-sensitive layer

Author

Zheng, Peng ; Chin, Tao-Lun ; Greve, David ; Oppenheim, Irving ; Malone, Vanessa ; Ashok, Tejasvi ; Miller, James ; Cao, Limin

Author_Institution

Nat. Energy Technol. Lab., Pittsburgh, PA, USA

fYear

2010

fDate

11-14 Oct. 2010

Firstpage

1462

Lastpage

1465

Abstract

High temperature langasite SAW oxygen sensors using ZnO as a resistive sensing layer were fabricated and tested in a wired configuration up to 650°C, representing an important step toward future high temperature wireless sensor development. ZnO layers deposited by spin coating and RF sputtering methods were compared. The langasite SAW sensor with spin coated ZnO sensing film had strongly increasing surface wave attenuation from 100°C to 250°C and undetectable reflections above 250°C. The langasite SAW gas sensor with sputtered ZnO sensing film showed clear oxygen gas flow response from 500°C to 650°C.

Keywords

gas sensors; spin coating; sputtering; surface acoustic wave sensors; zinc compounds; RF sputtering methods; ZnO; gas-sensitive layer; high temperature wireless sensor develop¬ ment; langasite SAW device; oxygen sensors; resistive sensing layer; spin coating; temperature 100 degC to 250 degC; temperature 500 degC to 650 degC; Gas detectors; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Temperature sensors; Zinc oxide; high temperature; langasite; oxygen sensor; spin coating; sputtering; surface scoustic wave; zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2010 IEEE

Conference_Location

San Diego, CA

ISSN

1948-5719

Print_ISBN

978-1-4577-0382-9

Type

conf

DOI

10.1109/ULTSYM.2010.5935779

Filename

5935779